Cleanroom http://nanomicro.byu.edu:3455/cleanroom/ ProjectForum site for Cleanroom. Tue, 26 Aug 2008 09:21:29 MDT en-us Maintenance Log - Trion ICP http://nanomicro.byu.edu:3455/cleanroom/506 Tue, 26 Aug 2008 09:21:29 MDT http://nanomicro.byu.edu:3455/cleanroom/506#20080826092129 Last modified Tue, 26 Aug 2008 09:21:29 MDT by Problem ICP RIE - Trion Chlorine http://nanomicro.byu.edu:3455/cleanroom/410 Sat, 23 Aug 2008 17:32:06 MDT http://nanomicro.byu.edu:3455/cleanroom/410#20080823173206 Last modified Sat, 23 Aug 2008 17:32:06 MDT by Problem 08/22/08 - Cleanroom Coordination Meeting http://nanomicro.byu.edu:3455/cleanroom/505 Fri, 22 Aug 2008 11:42:42 MDT http://nanomicro.byu.edu:3455/cleanroom/505#20080822114242 Last modified Fri, 22 Aug 2008 11:42:42 MDT by Jim Fraser 2008 Cleanroom Meetings http://nanomicro.byu.edu:3455/cleanroom/439 Thu, 21 Aug 2008 16:14:06 MDT http://nanomicro.byu.edu:3455/cleanroom/439#20080821161406 Last modified Thu, 21 Aug 2008 16:14:06 MDT by Jim Fraser Temperature & Humidity - 08/14/2008 http://nanomicro.byu.edu:3455/cleanroom/504 Thu, 14 Aug 2008 16:18:31 MDT http://nanomicro.byu.edu:3455/cleanroom/504#20080814161831 Last modified Thu, 14 Aug 2008 16:18:31 MDT by Jonathan Jones Temperature & Humidity - 07/22/2008 http://nanomicro.byu.edu:3455/cleanroom/500 Thu, 14 Aug 2008 16:16:26 MDT http://nanomicro.byu.edu:3455/cleanroom/500#20080814161626 Last modified Thu, 14 Aug 2008 16:16:26 MDT by Jonathan Jones Temperature & Humidity 2008 http://nanomicro.byu.edu:3455/cleanroom/442 Thu, 14 Aug 2008 16:12:12 MDT http://nanomicro.byu.edu:3455/cleanroom/442#20080814161212 Last modified Thu, 14 Aug 2008 16:12:12 MDT by Jonathan Jones Maintenance Log - PECVD 2 http://nanomicro.byu.edu:3455/cleanroom/161 Thu, 14 Aug 2008 10:31:42 MDT http://nanomicro.byu.edu:3455/cleanroom/161#20080814103142 Last modified Thu, 14 Aug 2008 10:31:42 MDT by Problem User Log - STS ICP RIE http://nanomicro.byu.edu:3455/cleanroom/297 Tue, 12 Aug 2008 13:46:02 MDT http://nanomicro.byu.edu:3455/cleanroom/297#20080812134602 Last modified Tue, 12 Aug 2008 13:46:02 MDT by Jonathan Jones User Log - Trion ICP http://nanomicro.byu.edu:3455/cleanroom/501 Tue, 12 Aug 2008 13:45:20 MDT http://nanomicro.byu.edu:3455/cleanroom/501#20080812134520 Last modified Tue, 12 Aug 2008 13:45:20 MDT by Jonathan Jones User Log - PECVD 2 http://nanomicro.byu.edu:3455/cleanroom/296 Tue, 12 Aug 2008 13:44:22 MDT http://nanomicro.byu.edu:3455/cleanroom/296#20080812134422 Last modified Tue, 12 Aug 2008 13:44:22 MDT by Jonathan Jones 08/01/08 - Cleanroom Coordination Meeting http://nanomicro.byu.edu:3455/cleanroom/503 Fri, 01 Aug 2008 11:37:23 MDT http://nanomicro.byu.edu:3455/cleanroom/503#20080801113723 Last modified Fri, 01 Aug 2008 11:37:23 MDT by Jim Fraser 07/25/08 - Cleanroom Coordination Meeting http://nanomicro.byu.edu:3455/cleanroom/502 Fri, 25 Jul 2008 11:10:15 MDT http://nanomicro.byu.edu:3455/cleanroom/502#20080725111015 Last modified Fri, 25 Jul 2008 11:10:15 MDT by Jim Fraser Maintenance Log - STS ICP RIE http://nanomicro.byu.edu:3455/cleanroom/60 Tue, 22 Jul 2008 17:20:17 MDT http://nanomicro.byu.edu:3455/cleanroom/60#20080722172017 Last modified Tue, 22 Jul 2008 17:20:17 MDT by Yusheng Qian Equipment User Logs http://nanomicro.byu.edu:3455/cleanroom/330 Tue, 22 Jul 2008 12:50:59 MDT http://nanomicro.byu.edu:3455/cleanroom/330#20080722125059 Last modified Tue, 22 Jul 2008 12:50:59 MDT by Jonathan Jones Usage Log - Sputter http://nanomicro.byu.edu:3455/cleanroom/227 Tue, 22 Jul 2008 12:49:34 MDT http://nanomicro.byu.edu:3455/cleanroom/227#20080722124934 Last modified Tue, 22 Jul 2008 12:49:34 MDT by Jonathan Jones USER LOGS- Ebeam http://nanomicro.byu.edu:3455/cleanroom/301 Tue, 22 Jul 2008 12:48:54 MDT http://nanomicro.byu.edu:3455/cleanroom/301#20080722124854 Last modified Tue, 22 Jul 2008 12:48:54 MDT by Jonathan Jones User Log - Anelva RIE http://nanomicro.byu.edu:3455/cleanroom/293 Tue, 15 Jul 2008 16:02:22 MDT http://nanomicro.byu.edu:3455/cleanroom/293#20080715160222 Last modified Tue, 15 Jul 2008 16:02:22 MDT by Jonathan Jones User Log - PECVD 1 http://nanomicro.byu.edu:3455/cleanroom/295 Tue, 15 Jul 2008 15:45:12 MDT http://nanomicro.byu.edu:3455/cleanroom/295#20080715154512 Last modified Tue, 15 Jul 2008 15:45:12 MDT by Jonathan Jones 07/11/08 - Cleanroom Coordination Meeting http://nanomicro.byu.edu:3455/cleanroom/499 Fri, 11 Jul 2008 11:59:52 MDT http://nanomicro.byu.edu:3455/cleanroom/499#20080711115952 Last modified Fri, 11 Jul 2008 11:59:52 MDT by Jim Fraser Maintenance Log - Karl Suss MA-150 Aligner http://nanomicro.byu.edu:3455/cleanroom/177 Tue, 08 Jul 2008 20:09:31 MDT http://nanomicro.byu.edu:3455/cleanroom/177#20080708200931 Last modified Tue, 08 Jul 2008 20:09:31 MDT by Problem STS ICP/RIE Recipes http://nanomicro.byu.edu:3455/cleanroom/266 Tue, 08 Jul 2008 16:16:19 MDT http://nanomicro.byu.edu:3455/cleanroom/266#20080708161619 Last modified Tue, 08 Jul 2008 16:16:19 MDT by Yusheng Qian Tempature and Humidity July 03 2008 http://nanomicro.byu.edu:3455/cleanroom/495 Thu, 03 Jul 2008 10:31:38 MDT http://nanomicro.byu.edu:3455/cleanroom/495#20080703103138 Last modified Thu, 03 Jul 2008 10:31:38 MDT by Jonathan Jones (page is empty) Temperature & Humidity - 07/03/2008 http://nanomicro.byu.edu:3455/cleanroom/496 Thu, 03 Jul 2008 10:07:33 MDT http://nanomicro.byu.edu:3455/cleanroom/496#20080703100733 Last modified Thu, 03 Jul 2008 10:07:33 MDT by Jonathan Jones